Room temperature ALD equipment - List of Manufacturers, Suppliers, Companies and Products | IPROS GMS

Room temperature ALD device CMVA-1000 for TGV and CPO use.

Compatible with high aspect ratio TGV/TSV. The world's largest chamber size (1000mm□) for ALD.

【Features】 ● Film formation at extremely low temperatures (room temperature to 100℃) Compatible with substrates and devices that have weak thermal resistance. ● Uniformity and density of the film Enables uniform and dense film formation even within fine structures and high aspect ratio holes. 【Applications】 - Capable of large area coverage - Film formation possible on high aspect ratio TGV/TSV - Film formation possible for SAW filters, solar cells, and other electronic component devices - Thin film deposition possible for delicate and complex 3D structures such as CPO (Co-Packaged Optics) - Support from R&D to production 【Consultation for film formation and test deposition available】 Creative Coatings offers test deposition and sample creation services. We can listen to your requirements and suggest suitable equipment, film types, and thicknesses. Please feel free to consult with us first.